Enhanced Software for VHX Microscopes
Software to get more out of your VHX microscope
How does it work?
An additional software interface (ScanX) is used to program automated scans and communicate to the Keyence VHX controller. Keyence programming library (DLL’s) are used to ensure smooth image acquisition and user operation.
In Partnership With
VHX Microscope Recipe Teaching, But Better
This software emulates most of what the VHX-X1 user software enables, but offers even more useful features to help operators use the microscope and further automate its capabilities. The software is built directly on Keyence supported programming libraries.
Recipe Files Your Way
Create stage position lists with more useful tools at your fingertips.
- Unlimited number of stage positions
- Teach single images and stitched areas at each location
- Per image naming and folder naming access
Graphical Scan Editor
Use the graphical interface to help set up scans.
- Move to stage position when graphical location is clicked
- Automatically calculate stitching parameters when features exceed the field of view
- Save, load, and assign maps to other scans for faster creation
Exclude Regions and Add Depth Stacking and Autofocus
- Stitch larger image areas faster by excluding images that are not needed
- Selectively add Depth Stacking and Autofocus as needed
Automated Part and Coordinate Alignment
- Use built in pattern matching to align parts to programmed fiducials
- Remove the need for operators to jog stages and manually align parts using crosshairs
Motorized Tilt and Rotary Stage
Tilt and part rotation stages are added to view the sample at an angle.
- Use the jog pad to tilt the microscope via an operator
- Use the recipe functionality to program tilt position
- Use the tilt stage encoder to read the exact tilt position
Advanced stage compatibility
Servo motor stages are used in conjunction with ScanX software. These stages have many benefits.
- Encoder feedback for true positioning accuracy
- More configuration options (larger travels, larger payloads, various orientations)
- Faster move and settle times for increased throughput
Use our API to write your own program
ScanX is available with an API that allows you to control the scripting and programming.
- Compatible with Python and MATLAB
- Use it to run multiple program recipe files without operator intervention
- HTTP REST API
Software Add-On
Image Classifier
The Classifier is an offline image viewer that provides additional functionality to the Keyence VHX Album.
- Open, classify, and annotate small and large images
- Use the thumbnail image to click and navigate at full resolution
- Can be used for graphical programming
Image of 300mm wafer at 100x with 293’000 x 293’000 pixels opened in classifier
Showing a 300mm wafer map coded for defects and areas of interest.
Wafer Map Functionality
The Classifier allows customers to load and create wafer maps.
- Load maps from upstream wafer processes
- Use the map to move the stages to the right location on the wafer
- Use the Classifier to adjust the wafer map as necessary
Large area stitching
ScanX enables larger area images to be stitched together when compared to the standard Keyence VHX software. ScanX includes a separate stitching routine that takes advantage of more powerful PC’s and memory allocation.
- Unlimited pixels can be stitched in a single image
- Various formatting and compression options
- Faster stitching times
Software Add-On
Image Processor
The Image Processor frees up your VHX so that it is not hung up stitching large image files.
- Offline stitching: Allows scans to be stitched on any computer
- Multiple image file formats (including ones not provided by the VHX software)
- Drag and drop file functionality
Showing 4 separate folders of individual images that were stitched offline (left). Showing the image stitching settings (right).
See the equipment in action
You probably want to see the equipment in operation before any purchase. Check out the videos below to give you a better idea of what the motion looks like when positioning parts and samples using our equipment.
Product overview video
Larger travel machine video
Demonstration of basic software functions
ScanX is a software user interface that enables the VHX microscope to be used with larger travel positioning systems.
Stage positioning and jogging
Use the jog pad to move the motorized stages. XY comes standard. VT (vertical and tilt) come optional.
Position lists and teaching routines
Use tables to predefine imaging areas to be captured. Reuse the position list for repetitive measurements.
Large area stitching
Specify an image area and overlap % and ScanX will create a stitched image.
Catalog documentation
Want to learn the details behind our large format stage options for VHX microscopes driven by ScanX software? Download the PDF catalog.
- Explanation of software features
- Stage specifications and dimensions
- Ordering information and much more
See what standard VHX features are supported
Additional Resources
Educational articles, white papers, and videos to help you make more informed decisions about your equipment purchases.